Author: Alves, F.
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WEAPL04 Nanoprobe Results: Metrology & Control in Stacked Closed-Loop Systems 1028
  • C. Engblom, Y.-M. Abiven, F. Alves, N. Jobert, S.K. Kubsky, F. Langlois, A. Lestrade
    SOLEIL, Gif-sur-Yvette, France
  • T. Stankevic
    MAX IV Laboratory, Lund University, Lund, Sweden
  Over the course of four years, the Nanoprobe project worked to deliver prototypes capable of nm-precision and accuracy with long-range millimetric sample positioning in 3D- scanning tomography for long beamline endstations of Synchrotron Soleil and MAXIV. The ambition of the project necessitated a joint progress between several fields of expertise combining mechanics, metrology, motion control, and software programming. Interferometry in stage characterization has been a crucial point; not only to qualify motion errors but to actively integrate it into control systems with feedback and/or feedforward schemes in order to reduce XYZ position errors down to the nm- level. As such, a new way of characterizing rotation stages was developed and ultimately used in control schemes utilising the Delta Tau PowerPMAC platform. This paper details the obtained results as well as the methodology and approach of the project to achieve this.  
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